Modelling and Analysis of Three-degree of Freedom Micro-positioning Stage
نویسندگان
چکیده
This paper presents a design and analysis approach for micropositioning stage based on 3-RPR parallel kinematic linkage. The dimensions of the stage are first obtained and static, dynamic characteristics of the stage are predicted. The objective here is to maximize the workspace (for ranges of both position and orientation) and minimize the singularities inherent in the system. After arriving the dimensions, the finite element model of linkage is developed in ANSYS and its resonant frequencies and deflections are also predicted to identify the effects of flexure hinges on overall performance.
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